Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) $ in Thousands	Dec. 31, 2022 USD ($) ft²	Dec. 31, 2021 USD ($)
Future minimum lease payments finance lease
2023	$ 6,114
2024	6,252
2025	5,930
2026	6,008
2027	6,128
Thereafter	61,586
Total lease payments	92,018
Less interest portion	(45,604)
Finance lease obligations	46,414
Future minimum lease payments operating lease
2023	6,588
2024	3,292
2025	2,172
2026	1,602
2027	799
Thereafter	13
Total lease payments	14,466
Less interest portion	(2,168)
Operating lease obligations	12,298
Future minimum lease payments finance and operating lease
2023	12,702
2024	9,544
2025	8,102
2026	7,610
2027	6,927
Thereafter	61,599
Total lease payments	106,484
Less interest portion	(47,772)
Total lease liabilities	$ 58,712	$ 56,467
Lease term and discount rate
Operating leases -Weighted-average remaining lease term (in years)	3 years 1 month 6 days
Finance leases - Weighted-average remaining lease term (in years)	14 years 1 month 6 days
Operating leases - Weighted-average discount rate	4.50%
Finance leases - Weighted-average discount rate	10.50%
Finance lease term	22 years
Area of Property \| ft²	98,000
Estimated lease payment	$ 32,500
Minimum
Lease term and discount rate
Operating lease term	1 year
Maximum
Lease term and discount rate
Operating lease term	10 years

Area of land for finance lease not yet commenced.

No definition available.

Name:	acls_AreaOfLandFinanceLeaseNotYetCommenced
Namespace Prefix:	acls_
Data Type:	dtr-types:areaItemType
Balance Type:	na
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

The estimated amount of future minimum lease payments for leases signed but not yet commenced in a lessee finance lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeFinanceLeaseLeaseNotYetCommencedEstimatedFutureMinimumLeasePayments
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee operating and finance lease liability payments due next twelve months.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating and finance lease.

+ References

No definition available.

+ Details

Name:	acls_OperatingAndFinanceLeaseLiability
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- References

No definition available.

+ Details

Name:	us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from finance lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 6
-URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918701-209980

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 1
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977

+ Details

Name:	us-gaap_FinanceLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for finance lease calculated at point in time.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(4)
-URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980

Reference 2: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI https://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980

Reference 2: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI https://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 3
-Subparagraph (a)(3)
-URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918673-209980

+ Details

Name:	us-gaap_LesseeFinanceLeaseTermOfContract1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseTermOfContract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- References

No definition available.

+ Details

Name:	us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 1
-Subparagraph (b)
-URI https://asc.fasb.org/extlink&oid=123391704&loc=SL77918627-209977

+ Details

Name:	us-gaap_OperatingLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for operating lease calculated at point in time.

+ References

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI https://asc.fasb.org/extlink&oid=123414884&loc=SL77918982-209971

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-URI https://asc.fasb.org/extlink&oid=128292326&loc=SL77918686-209980

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Details

Name:	srt_RangeAxis=srt_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: