Revenue (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020	Dec. 31, 2019
Disaggregation of Revenue
Deferred revenue	$ 154,777	$ 68,436	$ 23,058	$ 29,251
Short-term deferred revenue	123,471	60,454
Long-term deferred revenue	$ 31,306	$ 7,982
Maximum
Disaggregation of Revenue
Unsatisfied extended warranty performance obligations, period	24 months
Systems
Disaggregation of Revenue
Payment upon shipment of tool, as a percent	90.00%
Payment upon installation, as a percent	10.00%
Aftermarket | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Aftermarket | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days