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Inventories, net (Details) - USD ($)
$ in Thousands
Jun. 30, 2022
Dec. 31, 2021
Inventories, net    
Raw materials $ 149,985 $ 133,784
Work in process 44,895 43,164
Finished goods (completed systems) 18,183 18,036
Inventories, net $ 213,063 $ 194,984