Revenue (Details)	6 Months Ended
	Jun. 30, 2022
Systems
Disaggregation of Revenue
Payment upon shipment of tool, as a percent	90.00%
Payment upon installation, as a percent	10.00%
Aftermarket | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Aftermarket | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days