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Inventories, net (Tables)
6 Months Ended
Jun. 30, 2022
Inventories, net  
Schedule of components of inventories

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June 30,

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December 31,

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2022

    

2021

    

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(in thousands)

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Raw materials

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$

149,985

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$

133,784

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Work in process

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44,895

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43,164

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Finished goods (completed systems)

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18,183

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18,036

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Inventories, net

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$

213,063

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$

194,984

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