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Inventories, net (Tables)
6 Months Ended
Jun. 30, 2022
Inventories, net  
Schedule of components of inventories

June 30,

December 31,

    

2022

    

2021

    

(in thousands)

Raw materials

$

149,985

$

133,784

Work in process

 

44,895

 

43,164

Finished goods (completed systems)

 

18,183

 

18,036

Inventories, net

$

213,063

$

194,984