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Inventories, net (Tables)
3 Months Ended
Mar. 31, 2022
Inventories, net  
Schedule of components of inventories

March 31,

December 31,

    

2022

    

2021

    

(in thousands)

Raw materials

$

140,138

$

133,784

Work in process

 

45,537

 

43,164

Finished goods (completed systems)

 

18,163

 

18,036

Inventories, net

$

203,838

$

194,984