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Inventories, net (Tables)
3 Months Ended
Mar. 31, 2022
Inventories, net  
Schedule of components of inventories

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March 31,

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December 31,

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2022

    

2021

    

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(in thousands)

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Raw materials

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$

140,138

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$

133,784

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Work in process

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45,537

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43,164

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Finished goods (completed systems)

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18,163

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18,036

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Inventories, net

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$

203,838

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$

194,984

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