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Inventories, net (Tables)
12 Months Ended
Dec. 31, 2021
Inventories, net  
Schedule of components of inventories

December 31,

 

    

2021

    

2020

 

(in thousands)

 

Raw materials

$

133,784

$

100,254

Work in process

 

43,164

 

33,867

Finished goods (completed systems)

 

18,036

 

26,955

Inventories, net

$

194,984

$

161,076