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Inventories, net (Tables)
12 Months Ended
Dec. 31, 2021
Inventories, net  
Schedule of components of inventories

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December 31,

 

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2021

    

2020

 

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(in thousands)

 

Raw materials

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$

133,784

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$

100,254

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Work in process

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43,164

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33,867

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Finished goods (completed systems)

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18,036

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26,955

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Inventories, net

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$

194,984

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$

161,076

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