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Inventories, net (Details) - USD ($)
$ in Thousands
Sep. 30, 2021
Dec. 31, 2020
Inventories, net    
Raw materials $ 120,611 $ 100,254
Work in process 47,385 33,867
Finished goods (completed systems) 28,816 26,955
Inventories, net $ 196,812 $ 161,076