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Inventories, net (Tables)
9 Months Ended
Sep. 30, 2021
Inventories, net  
Schedule of components of inventories

September 30,

December 31,

    

2021

    

2020

    

(in thousands)

Raw materials

$

120,611

$

100,254

Work in process

 

47,385

 

33,867

Finished goods (completed systems)

 

28,816

 

26,955

Inventories, net

$

196,812

$

161,076