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Inventories, net (Tables)
6 Months Ended
Jun. 30, 2021
Inventories, net  
Schedule of components of inventories

June 30,

December 31,

    

2021

    

2020

    

(in thousands)

Raw materials

$

109,795

$

100,254

Work in process

 

40,233

 

33,867

Finished goods (completed systems)

 

42,293

 

26,955

Inventories, net

$

192,321

$

161,076