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Inventories, net (Details) - USD ($)
$ in Thousands
Dec. 31, 2020
Dec. 31, 2019
Inventories, net    
Raw materials $ 100,254 $ 95,867
Work in process 33,867 32,131
Finished goods (completed systems) 26,955 12,366
Inventories, net $ 161,076 $ 140,364