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Inventories, net (Tables)
12 Months Ended
Dec. 31, 2020
Inventories, net  
Schedule of components of inventories

December 31,

 

    

2020

    

2019

 

(in thousands)

 

Raw materials

$

100,254

$

95,867

Work in process

 

33,867

 

32,131

Finished goods (completed systems)

 

26,955

 

12,366

Inventories, net

$

161,076

$

140,364