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Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
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Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
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The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.

No definition available.

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Data Type:	xbrli:monetaryItemType
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Fair value of the amount outstanding under the credit facility.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 825
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Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef
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-Name Accounting Standards Codification
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Amount of cash inflow before closing and debt issuance costs received by a seller-lessee in a sale-leaseback recognized in financing activities.

Reference 1: http://fasb.org/us-gaap/role/ref/otherTransitionRef
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The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.

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Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

Name:	srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember
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Name:	us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember
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