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Inventories, net (Tables)
9 Months Ended
Sep. 30, 2020
Inventories, net  
Schedule of components of inventories

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September 30,

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December 31,

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2020

    

2019

    

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(in thousands)

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Raw materials

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$

93,990

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$

95,867

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Work in process

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42,643

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32,131

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Finished goods (completed systems)

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23,025

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12,366

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Inventories, net

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$

159,658

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$

140,364

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