Inventories, net (Tables)

3 Months Ended

Mar. 31, 2020

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2020		2019
	(in thousands)
Raw materials	$	87,772	$	95,867
Work in process		37,978		32,131
Finished goods (completed systems)		10,318		12,366
Inventories, net	$	136,068	$	140,364