Inventories, net (Tables)

12 Months Ended

Dec. 31, 2019

Inventories, net

Schedule of components of inventories

	December 31,
	2019		2018
	(in thousands)
Raw materials	$	95,867	$	91,875
Work in process		32,131		23,857
Finished goods (completed systems)		12,366		13,268
Inventories, net	$	140,364	$	129,000