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Inventories, net (Details) - USD ($)
$ in Thousands
Sep. 30, 2019
Dec. 31, 2018
Inventories, net    
Raw materials $ 95,758 $ 91,875
Work in process 30,486 23,857
Finished goods (completed systems) 12,109 13,268
Inventories, net $ 138,353 $ 129,000