Inventories, net (Tables)

9 Months Ended

Sep. 30, 2019

Inventories, net

Schedule of components of inventories

	September 30,		December 31,
	2019		2018
	(in thousands)
Raw materials	$	95,758	$	91,875
Work in process		30,486		23,857
Finished goods (completed systems)		12,109		13,268
Inventories, net	$	138,353	$	129,000