Inventories, net (Tables)

6 Months Ended

Jun. 30, 2019

Inventories, net

Schedule of components of inventories

	June 30,		December 31,
	2019		2018
	(in thousands)
Raw materials	$	97,922	$	91,875
Work in process		22,807		23,857
Finished goods (completed systems)		14,412		13,268
Inventories, net	$	135,141	$	129,000