Inventories, net (Tables)

3 Months Ended

Mar. 31, 2019

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2019		2018
	(in thousands)
Raw materials	$	95,639	$	91,875
Work in process		19,078		23,857
Finished goods (completed systems)		19,334		13,268
Inventories, net	$	134,051	$	129,000