Name:	acls_GiltiIncomeTaxExpenseBenefit
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

Represents the amount of provisional toll tax

No definition available.

Name:	acls_ProvisionalTollTaxAmount
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

Represents the percentage of tax on earnings in the form of cash and cash equivalents.

No definition available.

Name:	acls_TaxCutsAndJobsActOf2017EarningsInFormOfCashAndCashEquivalentsPercent
Namespace Prefix:	acls_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

Represents the percentage of tax on earnings other than in the form of cash and cash equivalents.

No definition available.

Name:	acls_TaxCutsAndJobsActOf2017EarningsOtherThanInFormOfCashAndCashEquivalentsPercent
Namespace Prefix:	acls_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

Amount of tax liability from transition tax on accumulated earnings of controlled foreign corporation deemed repatriated pursuant to Tax Cuts and Jobs Act of 2017.

No definition available.

Name:	acls_TaxCutsAndJobsActOf2017TransitionTaxForAccumulatedForeignEarningsLiability
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

Period of time over which TCJA transition tax on certain unrepatriated earnings of foreign subsidiaries may be paid.

No definition available.

Name:	acls_TaxCutsAndJobsActOf2017TransitionTaxPeriodForPayment
Namespace Prefix:	acls_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

Amount after allocation of valuation allowances of deferred tax asset attributable to deductible temporary differences and carryforwards classified as noncurrent.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 2
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32537-109319

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 6
-URI http://asc.fasb.org/extlink&oid=84176650&loc=d3e31931-109318

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=84176650&loc=d3e31928-109318

Reference 4: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 9
-URI http://asc.fasb.org/extlink&oid=84176650&loc=d3e31958-109318

Reference 5: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 45
-Paragraph 4
-URI http://asc.fasb.org/extlink&oid=84176650&loc=d3e31917-109318

Name:	us-gaap_DeferredTaxAssetsNetNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

Amount of valuation allowance of deferred tax asset attributable to deductible temporary differences and carryforwards, classified as noncurrent.

Name:	us-gaap_DeferredTaxAssetsValuationAllowanceNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

Percentage of domestic federal statutory tax rate applicable to pretax income (loss).

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 12
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32687-109319

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SAB TOPIC 6.I)
-URI http://asc.fasb.org/extlink&oid=34349781&loc=d3e330036-122817

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 740
-SubTopic 10
-Section 50
-Paragraph 13
-URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32698-109319

Name:	us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

- References

No definition available.