Schedule II Valuation and Qualifying Accounts

12 Months Ended

Dec. 31, 2018

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts

Axcelis Technologies, Inc.

(In thousands)

	Balance at		Charged to				Balance at
	Beginning of		Costs and				End of
	Period		Expenses		Deductions		Period
Year ended December 31, 2018
Allowance for doubtful accounts and returns	$	—	$	—	$	—	$	—
Deferred tax valuation allowance		7,136		(441)		(140)		6,835
Year ended December 31, 2017
Allowance for doubtful accounts and returns	$	77	$	—	$	77	$	—
Deferred tax valuation allowance		122,966		(115,831)		(1)		7,136
Year ended December 31, 2016
Allowance for doubtful accounts and returns	$	—	$	106	$	29	$	77
Deferred tax valuation allowance		132,263		(7,765)		1,532		122,966