Inventories, net (Tables)

9 Months Ended

Sep. 30, 2018

Inventories, net

Schedule of components of inventories

	September 30,		December 31,
	2018		2017
	(in thousands)
Raw materials	$	91,782	$	82,313
Work in process		23,849		31,651
Finished goods (completed systems)		8,377		6,580
Inventories, net	$	124,008	$	120,544