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Inventories, net (Details) - USD ($)
$ in Thousands
Jun. 30, 2018
Dec. 31, 2017
Inventories, net    
Raw materials $ 85,077 $ 82,313
Work in process 34,560 31,651
Finished goods (completed systems) 9,917 6,580
Inventories, net $ 129,554 $ 120,544