Inventories, net (Tables)

3 Months Ended

Mar. 31, 2018

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2018		2017
	(in thousands)
Raw materials	$	88,009	$	82,313
Work in process		33,696		31,651
Finished goods (completed systems)		13,300		6,580
Inventories, net	$	135,005	$	120,544