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Term of the lessee's leasing arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

No definition available.

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Data Type:	xbrli:durationItemType
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Present value of minimum lease payments for sale-leaseback transactions accounted for using the deposit method or as a financing.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 840
-SubTopic 30
-Section 50
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=6455398&loc=d3e45280-112737

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Data Type:	xbrli:monetaryItemType
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Period Type:	instant

Amount of cash inflow before closing and debt issuance costs received by a seller-lessee in a sale-leaseback recognized in financing activities.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 840
-SubTopic 40
-Section 55
-Paragraph 50
-URI http://asc.fasb.org/extlink&oid=28365400&loc=d3e51831-112757

Reference 2: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 840
-SubTopic 40
-Section 55
-Paragraph 51
-URI http://asc.fasb.org/extlink&oid=28365400&loc=d3e51840-112757

Reference 3: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 840
-SubTopic 40
-Section 55
-Paragraph 52
-URI http://asc.fasb.org/extlink&oid=28365400&loc=d3e51843-112757

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Data Type:	xbrli:monetaryItemType
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The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02.8,17)
-URI http://asc.fasb.org/extlink&oid=6877327&loc=d3e13212-122682

Name:	us-gaap_SecurityDeposit
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Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

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Name:	us-gaap_LeaseArrangementTypeAxis=acls_SaleAndLeaseBackMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Name:	us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember
Namespace Prefix:
Data Type:	na
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