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Inventories, net (Details) - USD ($)
$ in Thousands
Jun. 30, 2017
Dec. 31, 2016
Inventories, net    
Raw materials $ 79,850 $ 82,263
Work in process 27,532 14,117
Finished goods (completed systems) 15,192 17,473
Inventories, net 122,574 113,853
Inventory reserves $ 8,500 $ 8,800