Business Segment and Geographic Region Information (Tables)

12 Months Ended

Dec. 31, 2016

Business Segment and Geographic Region Information

Schedule of revenue by product lines

	Year ended December 31,
	2016		2015		2014
	(in thousands)
Ion implantation systems and services	$	248,885	$	282,624	$	183,148
Other systems and services		18,095		18,871		19,903
Total revenue	$	266,980	$	301,495	$	203,051

Schedule of revenue and long-lived assets by geographic region

			Long-Lived
	Revenue		Assets
	(in thousands)
2016
United States	$	191,261	$	52,006
Europe		25,436		—
Asia Pacific		50,283		517
	$	266,980	$	52,523
2015
United States	$	226,890	$	41,729
Europe		24,209		—
Asia Pacific		50,396		334
	$	301,495	$	42,063
2014
United States	$	126,255	$	40,001
Europe		29,140		—
Asia Pacific		47,656		299
	$	203,051	$	40,300