Schedule II-Valuation and Qualifying Account

12 Months Ended

Dec. 31, 2016

Schedule II-Valuation and Qualifying Accounts

Schedule II-Valuation and Qualifying Accounts

Schedule II—Valuation and Qualifying Accounts

Axcelis Technologies, Inc.

(In thousands)

	Balance at		Charged to						Balance at
	Beginning of		Costs and						End of
	Period		Expenses		Deductions		Other(*)		Period
Year ended December 31, 2016
Allowance for doubtful accounts and returns(**)	$	—	$	106	$	(29)	$	—	$	77
Reserve for excess and obsolete inventory(***)		10,465		1,051		(2,619)		—		8,897
Year ended December 31, 2015
Allowance for doubtful accounts and returns	$	390	$	—	$	(390)	$	—	$	—
Reserve for excess and obsolete inventory(***)		23,642		1,185		(14,362)		—		10,465
Year ended December 31, 2014
Allowance for doubtful accounts and returns	$	404	$	—	$	—	$	(14)	$	390
Reserve for excess and obsolete inventory(***)		25,091		1,003		(2,452)		—		23,642

(*)     Represents foreign currency translation adjustments.

(**)   Deductions include the write-off of accounts receivable.

(***) Deductions include the disposal and sale of fully reserved inventory