0001415889-24-008119.txt : 20240315 0001415889-24-008119.hdr.sgml : 20240315 20240315163057 ACCESSION NUMBER: 0001415889-24-008119 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20240315 FILED AS OF DATE: 20240315 DATE AS OF CHANGE: 20240315 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: GRAVES GREGORY B CENTRAL INDEX KEY: 0001208109 ORGANIZATION NAME: FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 24755299 MAIL ADDRESS: STREET 1: 129 CONCORD ROAD CITY: BILLERICA STATE: MA ZIP: 01821 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 form4-03152024_040338.xml X0508 4 2024-03-15 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001208109 GRAVES GREGORY B C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 true false false false 0 Common Stock 2024-03-15 4 A 0 1340 0 A 1340 D Common Stock 2024-03-15 4 A 0 670 0 A 2010 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on March 15, 2024. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on March 15, 2025. Of the shares held as of March 15, 2024, all were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on March 15, 2024. Assuming continuation of service on the Board of Directors, these restricted stock units will vest as to 25% of the shares granted on each of March 15, 2025, March 15, 2026, March 15, 2027 and March 15, 2028. /s/ Lynnette C. Fallon, Attorney-in-Fact 2024-03-15