0001209191-23-047911.txt : 20230901 0001209191-23-047911.hdr.sgml : 20230901 20230901081102 ACCESSION NUMBER: 0001209191-23-047911 CONFORMED SUBMISSION TYPE: 3 PUBLIC DOCUMENT COUNT: 2 CONFORMED PERIOD OF REPORT: 20230901 FILED AS OF DATE: 20230901 DATE AS OF CHANGE: 20230901 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Tatnall Christopher CENTRAL INDEX KEY: 0001990732 FILING VALUES: FORM TYPE: 3 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 231230671 MAIL ADDRESS: STREET 1: AXCELIS TECHNOLOGIES INC. STREET 2: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 3 1 doc3.xml FORM 3 SUBMISSION X0206 3 2023-09-01 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001990732 Tatnall Christopher C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 0 1 0 0 EVP Global Customer Operations Common Stock 7202 D Of the shares held as of September 1, 2023, 7,025 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Christopher Tatnall, Ph.D. 2023-09-01 EX-24.1 2 attachment1.htm EX-24.1 DOCUMENT


POWER OF ATTORNEY
For Executing Reports under Section 16(a)
with respect to securities of
AXCELIS TECHNOLOGIES INC.
	The undersigned hereby constitutes and appoints each of Russell J. Low,
Lynnette C. Fallon, and Megan Gates, Esq., of the Covington & Burling LLP law
firm, each acting singly, the undersigned s true and lawful attorney-in-fact,
from the date hereof until this Power of Attorney is revoked, to:
(1)	execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect
to securities of Axcelis Technologies, Inc. in accordance with Section 16(a) of
the Securities Exchange Act of 1934 and the rules thereunder, it being
understood that the documents executed by such attorney-in-fact on behalf of the
undersigned pursuant to this Power of Attorney shall be in such form and shall
contain such terms and conditions as such attorney-in-fact may approve in his or
her discretion; and
(2)	do and perform any and all acts, for and on behalf of the undersigned, that
may be necessary or desirable to complete the execution of any such Form 3, 4 or
5 and the timely filing of such form with the United States Securities and
Exchange Commission and any other authority.
	The undersigned hereby grants to each such attorney-in-fact full power and
authority to do and perform all and every act and thing whatsoever requisite,
necessary and proper to be done in the exercise of any of the rights and powers
herein granted, as fully for all intents and purposes as the undersigned might
or could do if personally present, with full power of substitution or
revocation, hereby ratifying and confirming all that such attorney-in-fact, or
his or her substitute or substitutes, shall lawfully do or cause to be done by
virtue of this power of attorney and the rights and powers herein granted.  The
undersigned acknowledges that the foregoing attorneys-in-fact, in serving in
such capacity at the request of the undersigned, are not assuming any of the
undersigned s responsibilities to comply with Section 16 of the Securities
Exchange Act of 1934.
	IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be
executed this 10th day of August, 2023.



						_/s/ Christopher Tatnall____________________
						Christopher Tatnall