X0407 4 2023-06-15 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001979418 Blumenstock Gerald M C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 0 1 0 0 EVP, Engineering 0 Common Stock 2023-06-15 4 A 0 4182 0.00 A 4182 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of employment, 25% of these restricted stock units will vest on each of June 15, 2024, June 15, 2025, June 15, 2026 and June 15, 2027. Of the shares held after this grant on June 15, 2023, 4,182 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Gerald M. Blumenstock 2023-06-15