0001209191-23-032863.txt : 20230530 0001209191-23-032863.hdr.sgml : 20230530 20230530161034 ACCESSION NUMBER: 0001209191-23-032863 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20230526 FILED AS OF DATE: 20230530 DATE AS OF CHANGE: 20230530 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Lawson Douglas A. CENTRAL INDEX KEY: 0001420601 FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23976439 MAIL ADDRESS: STREET 1: 21 VILLAGE VIEW ROAD CITY: WESTFORD STATE: MA ZIP: 01886 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 doc4.xml FORM 4 SUBMISSION X0407 4 2023-05-26 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001420601 Lawson Douglas A. C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 0 1 0 0 EVP, Corporate Mktg & Strategy 0 Common Stock 2023-05-26 4 S 0 200 153.00 D 19117 D Of the shares held as of May 26, 2023, 15,838 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Douglas A. Lawson 2023-05-30