0001209191-23-030594.txt : 20230518 0001209191-23-030594.hdr.sgml : 20230518 20230518160557 ACCESSION NUMBER: 0001209191-23-030594 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20230516 FILED AS OF DATE: 20230518 DATE AS OF CHANGE: 20230518 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Low Russell CENTRAL INDEX KEY: 0001689237 FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23936076 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 doc4.xml FORM 4 SUBMISSION X0407 4 2023-05-16 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001689237 Low Russell AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 1 0 0 President and CEO 0 Common Stock 2023-05-16 4 F 0 653 129.92 D 70586 D Common Stock 2023-05-17 4 F 0 905 137.69 D 69681 D These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units. Represents the closing price of the common stock on the date of the tax withholding. Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2023, 41,690 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Of the shares held after this tax withholding forfeiture (and related vesting) on May 17, 2023, 39,650 shares were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Russell J. Low, Ph.D. 2023-05-18