X0306 4 2023-02-13 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001158015 PUMA MARY G C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 1 0 0 President and CEO Common Stock 2023-02-13 4 S 0 22497 124.88 D 363905 D Common Stock 2023-02-13 4 S 0 2300 125.93 D 361605 D Common Stock 5000 I By spouse The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $124.75 to $125.57, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price. Of the shares held as of February 13, 2023, 118,906 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. The price reported in Column 4 is a weighted-average price. These shares were sold in multiple transactions at prices ranging from $125.77 to $126.14, inclusive. The reporting person undertakes to provide to Axcelis Technologies, Inc., any security holder of Axcelis Technologies, Inc., or the staff of the Securities and Exchange Commission, upon request, full information regarding the number of shares sold at each separate price. Lynnette C. Fallon, as attorney in fact for Mary G. Puma 2023-02-13