0001209191-22-029147.txt : 20220516 0001209191-22-029147.hdr.sgml : 20220516 20220516163112 ACCESSION NUMBER: 0001209191-22-029147 CONFORMED SUBMISSION TYPE: 4 PUBLIC DOCUMENT COUNT: 1 CONFORMED PERIOD OF REPORT: 20220516 FILED AS OF DATE: 20220516 DATE AS OF CHANGE: 20220516 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: St Dennis Thomas CENTRAL INDEX KEY: 0001339595 FILING VALUES: FORM TYPE: 4 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 22929778 MAIL ADDRESS: STREET 1: C/O FORMFACTOR, INC. STREET 2: 7005 SOUTHFRONT ROAD CITY: LIVERMORE STATE: CA ZIP: 94551 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 4 1 doc4.xml FORM 4 SUBMISSION X0306 4 2022-05-16 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001339595 St Dennis Thomas C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 2022-05-16 4 A 0 2689 0.00 A 25625 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service on the Board of Directors, these restricted stock units will vest on May 16, 2023. Of the shares held after this grant on of May 16, 2022, 2,689 shares were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Thomas St. Dennis 2022-05-16