X0306 4 2017-05-17 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001215024 FLETCHER R JOHN 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 2017-05-17 4 A 0 3802 0.00 A 40235 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 100% of these restricted stock units will vest on November 17, 2017. Of the shares held on May 17, 2017, 3,802 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for R. John Fletcher 2017-05-17