X0306 4 2017-05-17 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0001230508 FAUBERT RICHARD J C/O AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915 1 0 0 0 Common Stock 2017-05-17 4 A 0 3802 0.00 A 26689 D These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan. Assuming continuation of service as a director, 100% of these restricted stock units will vest on November 17, 2017. Of the shares held as of May 17, 2017, 9,427 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. Lynnette C. Fallon, as attorney in fact for Richard J. Faubert 2017-05-17