Merger (Details) $ / shares in Units, $ in Millions	Mar. 31, 2026 $ / shares	Dec. 31, 2025 $ / shares	Sep. 30, 2025 USD ($) $ / shares
Merger
Common stock, par value (in dollars per share) | $ / shares	$ 0.001	$ 0.001
Veeco Instruments Inc
Merger
Exchange Ratio			0.3575
Termination fee payable by Axcelis			$ 108.7
Termination fee receivable by Axcelis			77.5
Fixed expense reimbursement			$ 15.0
Veeco Instruments Inc
Merger
Common stock, par value (in dollars per share) | $ / shares			$ 0.01