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Inventories, net (Details) - USD ($)
$ in Thousands
Mar. 31, 2026
Dec. 31, 2025
Inventories, net    
Raw materials $ 265,737 $ 259,039
Work in process 47,130 51,761
Finished goods (completed systems) 13,185 18,210
Inventories, net $ 326,052 $ 329,010