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Inventories, net (Tables)
3 Months Ended
Mar. 31, 2026
Inventories, net  
Schedule of components of inventories

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March 31,

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December 31,

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2026

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2025

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(in thousands)

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Raw materials

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$

265,737

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$

259,039

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Work in process

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47,130

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51,761

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Finished goods (completed systems)

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13,185

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18,210

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Inventories, net

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$

326,052

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$

329,010

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