XML 45 R34.htm IDEA: XBRL DOCUMENT v3.26.1
Inventories, net (Tables)
3 Months Ended
Mar. 31, 2026
Inventories, net  
Schedule of components of inventories

March 31,

December 31,

  ​ ​ ​

2026

  ​ ​ ​

2025

  ​ ​ ​

(in thousands)

Raw materials

$

265,737

$

259,039

Work in process

 

47,130

 

51,761

Finished goods (completed systems)

 

13,185

 

18,210

Inventories, net

$

326,052

$

329,010