3.26.1 html 111 276 1 false 41 0 false 6 false false R1.htm 995200090 - Document - Document and Entity Information Sheet http://www.axcelis.com/role/DocumentDocumentAndEntityInformation Document and Entity Information Cover 1 false false R2.htm 995200100 - Statement - Consolidated Statements of Operations Sheet http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations Consolidated Statements of Operations Statements 2 false false R3.htm 995200200 - Statement - Consolidated Statements of Comprehensive Income Sheet http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome Consolidated Statements of Comprehensive Income Statements 3 false false R4.htm 995200300 - Statement - Consolidated Balance Sheets Sheet http://www.axcelis.com/role/StatementConsolidatedBalanceSheets Consolidated Balance Sheets Statements 4 false false R5.htm 995200305 - Statement - Consolidated Balance Sheets (Parenthetical) Sheet http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical Consolidated Balance Sheets (Parenthetical) Statements 5 false false R6.htm 995200400 - Statement - Consolidated Statements of Stockholders' Equity Sheet http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity Consolidated Statements of Stockholders' Equity Statements 6 false false R7.htm 995200500 - Statement - Consolidated Statements of Cash Flows Sheet http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows Consolidated Statements of Cash Flows Statements 7 false false R8.htm 995210101 - Disclosure - Nature of Business Sheet http://www.axcelis.com/role/DisclosureNatureOfBusiness Nature of Business Notes 8 false false R9.htm 995210201 - Disclosure - Stock-Based Compensation Sheet http://www.axcelis.com/role/DisclosureStockBasedCompensation Stock-Based Compensation Notes 9 false false R10.htm 995210301 - Disclosure - Leases Sheet http://www.axcelis.com/role/DisclosureLeases Leases Notes 10 false false R11.htm 995210401 - Disclosure - Revenue Sheet http://www.axcelis.com/role/DisclosureRevenue Revenue Notes 11 false false R12.htm 995210501 - Disclosure - Receivables and Allowance for Credit Losses Sheet http://www.axcelis.com/role/DisclosureReceivablesAndAllowanceForCreditLosses Receivables and Allowance for Credit Losses Notes 12 false false R13.htm 995210601 - Disclosure - Computation of Net Earnings per Share Sheet http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare Computation of Net Earnings per Share Notes 13 false false R14.htm 995210701 - Disclosure - Accumulated Other Comprehensive Loss Sheet http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveLoss Accumulated Other Comprehensive Loss Notes 14 false false R15.htm 995210801 - Disclosure - Cash, cash equivalents and restricted cash Sheet http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash Cash, cash equivalents and restricted cash Notes 15 false false R16.htm 995210901 - Disclosure - Inventories, net Sheet http://www.axcelis.com/role/DisclosureInventoriesNet Inventories, net Notes 16 false false R17.htm 995211001 - Disclosure - Product Warranty Sheet http://www.axcelis.com/role/DisclosureProductWarranty Product Warranty Notes 17 false false R18.htm 995211101 - Disclosure - Fair Value Measurements Sheet http://www.axcelis.com/role/DisclosureFairValueMeasurements Fair Value Measurements Notes 18 false false R19.htm 995211201 - Disclosure - Financing Arrangements Sheet http://www.axcelis.com/role/DisclosureFinancingArrangements Financing Arrangements Notes 19 false false R20.htm 995211301 - Disclosure - Income Taxes Sheet http://www.axcelis.com/role/DisclosureIncomeTaxes Income Taxes Notes 20 false false R21.htm 995211401 - Disclosure - Concentration of Risk Sheet http://www.axcelis.com/role/DisclosureConcentrationOfRisk Concentration of Risk Notes 21 false false R22.htm 995211501 - Disclosure - Share Repurchase Sheet http://www.axcelis.com/role/DisclosureShareRepurchase Share Repurchase Notes 22 false false R23.htm 995211601 - Disclosure - Contingencies Sheet http://www.axcelis.com/role/DisclosureContingencies Contingencies Notes 23 false false R24.htm 995211701 - Disclosure - Business Segment Sheet http://www.axcelis.com/role/DisclosureBusinessSegment Business Segment Notes 24 false false R25.htm 995211801 - Disclosure - Recent Accounting Guidance Sheet http://www.axcelis.com/role/DisclosureRecentAccountingGuidance Recent Accounting Guidance Notes 25 false false R26.htm 995211901 - Disclosure - Merger Sheet http://www.axcelis.com/role/DisclosureMerger Merger Notes 26 false false R27.htm 995410 - Disclosure - Pay vs Performance Disclosure Sheet http://xbrl.sec.gov/ecd/role/PvpDisclosure Pay vs Performance Disclosure Notes 27 false false R28.htm 995445 - Disclosure - Insider Trading Arrangements Sheet http://xbrl.sec.gov/ecd/role/InsiderTradingArrangements Insider Trading Arrangements Notes 28 false false R29.htm 99930303 - Disclosure - Leases (Tables) Sheet http://www.axcelis.com/role/DisclosureLeasesTables Leases (Tables) Tables http://www.axcelis.com/role/DisclosureLeases 29 false false R30.htm 99930403 - Disclosure - Revenue (Tables) Sheet http://www.axcelis.com/role/DisclosureRevenueTables Revenue (Tables) Tables http://www.axcelis.com/role/DisclosureRevenue 30 false false R31.htm 99930603 - Disclosure - Computation of Net Earnings per Share (Tables) Sheet http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables Computation of Net Earnings per Share (Tables) Tables http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare 31 false false R32.htm 99930703 - Disclosure - Accumulated Other Comprehensive Loss (Tables) Sheet http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveLossTables Accumulated Other Comprehensive Loss (Tables) Tables http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveLoss 32 false false R33.htm 99930803 - Disclosure - Cash, cash equivalents and restricted cash (Tables) Sheet http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables Cash, cash equivalents and restricted cash (Tables) Tables http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash 33 false false R34.htm 99930903 - Disclosure - Inventories, net (Tables) Sheet http://www.axcelis.com/role/DisclosureInventoriesNetTables Inventories, net (Tables) Tables http://www.axcelis.com/role/DisclosureInventoriesNet 34 false false R35.htm 99931003 - Disclosure - Product Warranty (Tables) Sheet http://www.axcelis.com/role/DisclosureProductWarrantyTables Product Warranty (Tables) Tables http://www.axcelis.com/role/DisclosureProductWarranty 35 false false R36.htm 99931103 - Disclosure - Fair Value Measurements (Tables) Sheet http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables Fair Value Measurements (Tables) Tables http://www.axcelis.com/role/DisclosureFairValueMeasurements 36 false false R37.htm 99931703 - Disclosure - Business Segment (Tables) Sheet http://www.axcelis.com/role/DisclosureBusinessSegmentTables Business Segment (Tables) Tables http://www.axcelis.com/role/DisclosureBusinessSegment 37 false false R38.htm 99940201 - Disclosure - Stock-Based Compensation (Details) Sheet http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails Stock-Based Compensation (Details) Details http://www.axcelis.com/role/DisclosureStockBasedCompensation 38 false false R39.htm 99940301 - Disclosure - Leases (Details) Sheet http://www.axcelis.com/role/DisclosureLeasesDetails Leases (Details) Details http://www.axcelis.com/role/DisclosureLeasesTables 39 false false R40.htm 99940302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details) Sheet http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details) Details 40 false false R41.htm 99940303 - Disclosure - Leases - Lease Cost (Details) Sheet http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails Leases - Lease Cost (Details) Details 41 false false R42.htm 99940304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Sheet http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Details 42 false false R43.htm 99940305 - Disclosure - Leases - Cash Flow by Lease Type (Details) Sheet http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails Leases - Cash Flow by Lease Type (Details) Details 43 false false R44.htm 99940401 - Disclosure - Revenue - Revenue by discipline & geographical areas (Details) Sheet http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails Revenue - Revenue by discipline & geographical areas (Details) Details 44 false false R45.htm 99940402 - Disclosure - Revenue - Contract liabilities (Details) Sheet http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails Revenue - Contract liabilities (Details) Details 45 false false R46.htm 99940403 - Disclosure - Revenue - Deferred Revenue (Details) Sheet http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails Revenue - Deferred Revenue (Details) Details 46 false false R47.htm 99940404 - Disclosure - Revenue (Details) Sheet http://www.axcelis.com/role/DisclosureRevenueDetails Revenue (Details) Details http://www.axcelis.com/role/DisclosureRevenueTables 47 false false R48.htm 99940501 - Disclosure - Receivables and Allowances for Credit Losses (Details) Sheet http://www.axcelis.com/role/DisclosureReceivablesAndAllowancesForCreditLossesDetails Receivables and Allowances for Credit Losses (Details) Details 48 false false R49.htm 99940601 - Disclosure - Computation of Net Earnings per Share (Details) Sheet http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails Computation of Net Earnings per Share (Details) Details http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables 49 false false R50.htm 99940701 - Disclosure - Accumulated Other Comprehensive Loss (Details) Sheet http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveLossDetails Accumulated Other Comprehensive Loss (Details) Details http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveLossTables 50 false false R51.htm 99940801 - Disclosure - Cash, cash equivalents and restricted cash (Details) Sheet http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails Cash, cash equivalents and restricted cash (Details) Details http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables 51 false false R52.htm 99940901 - Disclosure - Inventories, net (Details) Sheet http://www.axcelis.com/role/DisclosureInventoriesNetDetails Inventories, net (Details) Details http://www.axcelis.com/role/DisclosureInventoriesNetTables 52 false false R53.htm 99941001 - Disclosure - Product Warranty (Details) Sheet http://www.axcelis.com/role/DisclosureProductWarrantyDetails Product Warranty (Details) Details http://www.axcelis.com/role/DisclosureProductWarrantyTables 53 false false R54.htm 99941101 - Disclosure - Fair Value Measurements (Details) Sheet http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails Fair Value Measurements (Details) Details http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables 54 false false R55.htm 99941102 - Disclosure - Fair Value Measurements - Contractual maturities (Details) Sheet http://www.axcelis.com/role/DisclosureFairValueMeasurementsContractualMaturitiesDetails Fair Value Measurements - Contractual maturities (Details) Details 55 false false R56.htm 99941201 - Disclosure - Financing Arrangements (Details) Sheet http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails Financing Arrangements (Details) Details http://www.axcelis.com/role/DisclosureFinancingArrangements 56 false false R57.htm 99941301 - Disclosure - Income Taxes (Details) Sheet http://www.axcelis.com/role/DisclosureIncomeTaxesDetails Income Taxes (Details) Details http://www.axcelis.com/role/DisclosureIncomeTaxes 57 false false R58.htm 99941401 - Disclosure - Concentration of Risk (Details) Sheet http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails Concentration of Risk (Details) Details http://www.axcelis.com/role/DisclosureConcentrationOfRisk 58 false false R59.htm 99941501 - Disclosure - Share Repurchase (Details) Sheet http://www.axcelis.com/role/DisclosureShareRepurchaseDetails Share Repurchase (Details) Details http://www.axcelis.com/role/DisclosureShareRepurchase 59 false false R60.htm 99941701 - Disclosure - Business Segment and Geographic Region Information - Number of Segments (Details) Sheet http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationNumberOfSegmentsDetails Business Segment and Geographic Region Information - Number of Segments (Details) Details 60 false false R61.htm 99941702 - Disclosure - Business Segment and Geographic Region Information - Single Operating Segment (Details) Sheet http://www.axcelis.com/role/DisclosureBusinessSegmentAndGeographicRegionInformationSingleOperatingSegmentDetails Business Segment and Geographic Region Information - Single Operating Segment (Details) Details 61 false false R62.htm 99941901 - Disclosure - Merger (Details) Sheet http://www.axcelis.com/role/DisclosureMergerDetails Merger (Details) Details http://www.axcelis.com/role/DisclosureMerger 62 false false All Reports Book All Reports acls-20260331.xsd acls-20260331_cal.xml acls-20260331_def.xml acls-20260331_lab.xml acls-20260331_pre.xml acls-20260331x10q.htm http://fasb.org/srt/2025 http://fasb.org/us-gaap/2025 http://xbrl.sec.gov/dei/2025 http://xbrl.sec.gov/ecd/2025 true true