Merger (Details) $ / shares in Units, $ in Millions	Dec. 31, 2025 $ / shares	Sep. 30, 2025 USD ($) $ / shares shares	Dec. 31, 2024 $ / shares
Merger
Common stock, par value (in dollars per share) | $ / shares	$ 0.001		$ 0.001
Veeco Instruments Inc
Merger
Exchange Ratio		0.3575
Number of fractional shares issued at the time of merger | shares		0
Termination fee payable by Axcelis		$ 108.7
Termination fee receivable by Axcelis		77.5
Fixed expense reimbursement		$ 15.0
Veeco Instruments Inc
Merger
Common stock, par value (in dollars per share) | $ / shares		$ 0.01