Business Segment and Geographic Region Information - Revenue by Product Lines (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2025	Dec. 31, 2024	Dec. 31, 2023
Revenue by product lines
Total revenue	$ 839,048	$ 1,017,865	$ 1,130,604
Ion implantation systems and services
Revenue by product lines
Total revenue	824,098	1,001,045	1,111,278
Other systems and services
Revenue by product lines
Total revenue	$ 14,950	$ 16,820	$ 19,326