Merger (Details) $ / shares in Units, $ in Millions	Sep. 30, 2025 USD ($) $ / shares	Dec. 31, 2024 $ / shares
Business Combination [Line Items]
Common stock, par value (in dollars per share) | $ / shares	$ 0.001	$ 0.001
Veeco Instruments Inc
Business Combination [Line Items]
Exchange Ratio	0.3575
Termination fee payable by Axcelis	$ 108.7
Termination fee receivable by Axcelis	77.5
Fixed expense reimbursement	$ 15.0
Veeco Instruments Inc
Business Combination [Line Items]
Common stock, par value (in dollars per share) | $ / shares	$ 0.01