0001104659-24-029398.txt : 20240229 0001104659-24-029398.hdr.sgml : 20240229 20240229163052 ACCESSION NUMBER: 0001104659-24-029398 CONFORMED SUBMISSION TYPE: 8-K PUBLIC DOCUMENT COUNT: 17 CONFORMED PERIOD OF REPORT: 20240228 ITEM INFORMATION: Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers ITEM INFORMATION: Other Events ITEM INFORMATION: Financial Statements and Exhibits FILED AS OF DATE: 20240229 DATE AS OF CHANGE: 20240229 FILER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 8-K SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 24704258 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 8-K 1 tm246619d1_8k.htm FORM 8-K
false 0001113232 0001113232 2024-02-28 2024-02-28 iso4217:USD xbrli:shares iso4217:USD xbrli:shares

 

 

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

 

FORM 8-K

 

CURRENT REPORT

Pursuant to Section 13 or 15(d)
of the Securities Exchange Act of 1934

 

Date of Report (Date of earliest event reported): February 28, 2024

 

Axcelis Technologies, Inc.

(Exact name of registrant as specified in its charter)

 

Delaware   000-30941   34-1818596
(State or other jurisdiction   (Commission   (IRS Employer
of incorporation)   File Number)   Identification No.)

 

108 Cherry Hill Drive, Beverly, Massachusetts   01915
(Address of principal executive offices)   (Zip Code)

 

Registrant’s telephone number, including area code: (978) 787-4000

 

 

(Former name or former address, if changed since last report.)

 

Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:

 

¨Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)
  
¨Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)
  
¨Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))
  
¨Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))

 

Securities registered pursuant to Section 12(b) of the Act:

 

Title of each class Trading symbol(s) Name of each exchange on which registered
Common Stock, $0.001 par value ACLS Nasdaq Global Select Market

 

Indicate by check mark whether the registrant is an emerging growth company as defined in Rule 405 of the Securities Act of 1933(§230.405 of this chapter) or Rule 12b-2 of the Securities Exchange Act of 1934 (§240.12b-2 of this chapter).

 

Emerging growth company ¨

 

If an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act. ¨

  

 

 

 

 

Item 5.02 Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

 

(d)            Election of Directors.  On February 28, 2024, pursuant to Section 6.1 of Article Third of the Restated Certificate of Incorporation of Axcelis Technologies, Inc. (the “Company”) and Section 2.2 of the Bylaws of the Company, the Board of Directors of the Company expanded the number of members of the Board of Directors to eleven. Immediately thereafter, pursuant to Section 6.3 of Article Third of the Restated Certificate of Incorporation of the Company and Section 2.4 of the Bylaws of the Company, the Board of Directors elected Gregory B. Graves and Necip Sayiner to fill the vacancies on the Board for a term ending at the 2024 Annual Meeting of Stockholders. The Company’s press release regarding these new directors is attached as Exhibit 99.1 to this Current Report on Form 8-K.

 

Information about Mr. Graves’s and Dr. Sayiner’s committee assignments is incorporated by reference from Item 8.01 below. Each of Mr. Graves and Dr. Sayiner will participate in the Company’s non-employee director compensation arrangements, a description of which appears under the heading “Director Compensation” in the proxy statement for the Company’s 2023 annual meeting of stockholders and is incorporated herein by reference. On February 29, 2024, upon recommendation of the Nominating and Governance Committee and the Compensation Committee, the full Board of Directors approved the grant of two restricted stock unit awards to each of Mr. Graves and Dr. Sayiner on March 15, 2024. One of the RSU awards, a new director grant, will be for a number of units with a value of $160,000 that will vest as to 25% of the units on each of the first four anniversaries of the date of grant, assuming continuation of service. The second RSU award is a pro-rated 2023 annual director grant and will be for a number of units with a value of $80,000 vesting one year after the date of grant, assuming continuation of service on the Board. The number of units will be determined using a closing price average for a 30 day period ending prior to the grant.

 

In addition, each of Mr. Graves and Dr. Sayiner have received an indemnification agreement in the form executed by all non-employee directors, as described under the heading “Board of Directors -- Compensation of Directors” in the proxy statement for the Company’s 2023 annual meeting of stockholders.

 

Item 8.01 Other Events.

 

On February 28, 2024, the Board of Directors of the Company:

 

·appointed Gregory B. Graves, John T. Kurtzweil, Necip Sayiner, Jorge Titinger and Dipti Vachani to serve as the Compensation Committee of the Board of Directors, with Mr. Titinger designated as Chairperson thereof;

 

·appointed Joseph P. Keithley, John T. Kurtzweil, Jorge Titinger, Gregory B. Graves and Jeanne Quirk to serve as the Audit Committee of the Board of Directors, with Mr. Kurtzweil designated as Chairperson thereof;

 

·appointed Thomas St. Dennis, Tzu-Yin Chiu, Necip Sayiner, and Dipti Vachani to serve as the Technology and New Product Development Committee of the Board of Directors, with Mr. St. Dennis designated as Chairperson thereof; and

 

 

 

 

·appointed Joseph P. Keithley, Thomas St. Dennis, Tzu-Yin Chiu and Jeanne Quirk to serve as the Nominating and Governance Committee of the Board of Directors, with Mr. Keithley designated as Chairperson thereof.

 

Such elections and appointments are to serve until the next annual meeting of the Board of Directors and until such director’s successor has been elected and qualified, or until such director’s earlier death, resignation or removal.

 

Item 9.01.              Financial Statements and Exhibits

 

(d)       Exhibits

 

Exhibit No.   Description
     
99.1   Press Release dated February 28, 2024. Filed herewith.
104   Cover Page Interactive Data File (embedded within the Inline XBRL document)

 

SIGNATURE

 

Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.

 

Date: February 29, 2024 Axcelis Technologies, Inc.
     
     
  By: /s/ Lynnette C. Fallon
    Lynnette C. Fallon
    Executive Vice President HR/Legal and General Counsel

 

 

 

EX-99.1 2 tm246619d1_ex99-1.htm EXHIBIT 99.1

 

Exhibit 99.1

 

 

 

News Release

 

AXCELIS STRENGTHENS ITS BOARD WITH

THE ELECTION OF TWO DIRECTORS

 

BEVERLY, Mass., Feb. 28, 2024 -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that Gregory Graves and Necip Sayiner have been elected to the Company’s Board of Directors.

 

“We are pleased to welcome Gregory Graves and Dr. Necip Sayiner to the Axcelis board," said President and CEO of Axcelis Technologies, Russell Low. “We believe their combined experience in semiconductor technology, strategy and business development will be a tremendous asset to Axcelis. We look forward to their contributions as we lead Axcelis to the next level of growth."

 

Mr. Graves served as chief financial officer of Entegris, Inc., a leading supplier of advanced materials and process solutions for the semiconductor and other high-technology industries, from 2007 to 2023, having served as senior vice president, strategic planning and business development from 2002 to 2007. Prior to joining Entegris, Mr. Graves held positions in investment banking and corporate development, including at Piper Jaffray, RBC (Dain Rauscher) and The Pillsbury Company. Mr. Graves also currently serves as a director of Skywater Technologies, Inc., a semiconductor manufacturer. Mr. Graves received a Bachelor of Arts degree and a Master of Accounting and Taxation degree from the University of Alabama. He also received a Master of Business Administration degree from the University of Virginia.

 

Dr. Sayiner served as executive vice president and general manager at Renesas Electronics Corporation, a developer and manufacturer of semiconductor products from 2017 to 2019. Prior to that, beginning in 2013, he served as president and CEO of Intersil Corporation, a leading provider of innovative power management and precision analog solutions. Prior to Intersil, Dr. Sayiner was president and CEO of Silicon Laboratories and held various executive roles at Agere Systems. He is currently a board member at Rambus, Inc., a manufacturer of semiconductor chips and IP that advance data center connectivity. Dr. Sayiner holds a doctoral degree in Electrical Engineering from the University of Pennsylvania, a Master of Science degree in Engineering from Southern Illinois University, along with a Bachelor of Science degree in Electrical and Electronics Engineering and a Bachelor of Science degree in Physics from Bosphorus University in Turkey.

 

 

 

 

 

 

News Release

 

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 45 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

 

CONTACTS:

 

Maureen Hart (editorial/media) 978.787.4266

Doug Lawson (investor relations) 978.787.9552

 

###

 

 

 

EX-101.SCH 3 acls-20240228.xsd XBRL TAXONOMY EXTENSION SCHEMA 00000001 - Document - Cover link:presentationLink link:calculationLink link:definitionLink EX-101.LAB 4 acls-20240228_lab.xml XBRL TAXONOMY EXTENSION LABEL LINKBASE Cover [Abstract] Document Type Amendment Flag Amendment Description Document Registration Statement Document Annual Report Document Quarterly Report Document Transition Report Document Shell Company Report Document Shell Company Event Date Document Period Start Date Document Period End Date Document Fiscal Period Focus Document Fiscal Year Focus Current Fiscal Year End Date Entity File Number Entity Registrant Name Entity Central Index Key Entity Primary SIC Number Entity Tax Identification Number Entity Incorporation, State or Country Code Entity Address, Address Line One Entity Address, Address Line Two Entity Address, Address Line Three Entity Address, City or Town Entity Address, State or Province Entity Address, Country Entity Address, Postal Zip Code Country Region City Area Code Local Phone Number Extension Written Communications Soliciting Material Pre-commencement Tender Offer Pre-commencement Issuer Tender Offer Title of 12(b) Security No Trading Symbol Flag Trading Symbol Security Exchange Name Title of 12(g) Security Security Reporting Obligation Annual Information Form Audited Annual Financial Statements Entity Well-known Seasoned Issuer Entity Voluntary Filers Entity Current Reporting Status Entity Interactive Data Current Entity Filer Category Entity Small Business Entity Emerging Growth Company Elected Not To Use the Extended Transition Period Document Accounting Standard Other Reporting Standard Item Number Entity Shell Company Entity Public Float Entity Bankruptcy Proceedings, Reporting Current Entity Common Stock, Shares Outstanding Documents Incorporated by Reference [Text Block] EX-101.PRE 5 acls-20240228_pre.xml XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE GRAPHIC 6 tm246619d1_ex99-1img001.jpg GRAPHIC begin 644 tm246619d1_ex99-1img001.jpg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tm246619d1_ex99-1img002.jpg GRAPHIC begin 644 tm246619d1_ex99-1img002.jpg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end XML 8 R1.htm IDEA: XBRL DOCUMENT v3.24.0.1
Cover
Feb. 28, 2024
Cover [Abstract]  
Document Type 8-K
Amendment Flag false
Document Period End Date Feb. 28, 2024
Entity File Number 000-30941
Entity Registrant Name Axcelis Technologies, Inc.
Entity Central Index Key 0001113232
Entity Tax Identification Number 34-1818596
Entity Incorporation, State or Country Code DE
Entity Address, Address Line One 108 Cherry Hill Drive
Entity Address, City or Town Beverly
Entity Address, State or Province MA
Entity Address, Postal Zip Code 01915
City Area Code 978
Local Phone Number 787-4000
Written Communications false
Soliciting Material false
Pre-commencement Tender Offer false
Pre-commencement Issuer Tender Offer false
Title of 12(b) Security Common Stock, $0.001 par value
Trading Symbol ACLS
Security Exchange Name NASDAQ
Entity Emerging Growth Company false
EXCEL 10 Financial_Report.xlsx IDEA: XBRL DOCUMENT begin 644 Financial_Report.xlsx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end XML 11 Show.js IDEA: XBRL DOCUMENT // Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission. Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105. var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0); e.removeAttribute('id');a.parentNode.appendChild(e)}} if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'} e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}} XML 12 report.css IDEA: XBRL DOCUMENT /* Updated 2009-11-04 */ /* v2.2.0.24 */ /* DefRef Styles */ ..report table.authRefData{ background-color: #def; border: 2px solid #2F4497; font-size: 1em; position: absolute; } ..report table.authRefData a { display: block; font-weight: bold; } ..report table.authRefData p { margin-top: 0px; } ..report table.authRefData .hide { background-color: #2F4497; padding: 1px 3px 0px 0px; text-align: right; } ..report table.authRefData .hide a:hover { background-color: #2F4497; } ..report table.authRefData .body { height: 150px; overflow: auto; width: 400px; } ..report table.authRefData table{ font-size: 1em; } /* Report Styles */ ..pl a, .pl a:visited { color: black; text-decoration: none; } /* table */ ..report { background-color: white; border: 2px solid #acf; clear: both; color: black; font: normal 8pt Helvetica, Arial, san-serif; margin-bottom: 2em; } ..report hr { border: 1px solid #acf; } /* Top labels */ ..report th { background-color: #acf; color: black; font-weight: bold; text-align: center; } ..report th.void { background-color: transparent; color: #000000; font: bold 10pt Helvetica, Arial, san-serif; text-align: left; } ..report .pl { text-align: left; vertical-align: top; white-space: normal; width: 200px; white-space: normal; /* word-wrap: break-word; */ } ..report td.pl a.a { cursor: pointer; display: block; width: 200px; overflow: hidden; } ..report td.pl div.a { width: 200px; } ..report td.pl a:hover { background-color: #ffc; } /* Header rows... */ ..report tr.rh { background-color: #acf; color: black; font-weight: bold; } /* Calendars... */ ..report .rc { background-color: #f0f0f0; } /* Even rows... */ ..report .re, .report .reu { background-color: #def; } ..report .reu td { border-bottom: 1px solid black; } /* Odd rows... */ ..report .ro, .report .rou { background-color: white; } ..report .rou td { border-bottom: 1px solid black; } ..report .rou table td, .report .reu table td { border-bottom: 0px solid black; } /* styles for footnote marker */ ..report .fn { white-space: nowrap; } /* styles for numeric types */ ..report .num, .report .nump { text-align: right; white-space: nowrap; } ..report .nump { padding-left: 2em; } ..report .nump { padding: 0px 0.4em 0px 2em; } /* styles for text types */ ..report .text { text-align: left; white-space: normal; } ..report .text .big { margin-bottom: 1em; width: 17em; } ..report .text .more { display: none; } ..report .text .note { font-style: italic; font-weight: bold; } ..report .text .small { width: 10em; } ..report sup { font-style: italic; } ..report .outerFootnotes { font-size: 1em; } XML 14 FilingSummary.xml IDEA: XBRL DOCUMENT 3.24.0.1 html 1 22 1 false 0 0 false 3 false false R1.htm 00000001 - Document - Cover Sheet http://axcelis.com/role/Cover Cover Cover 1 false false All Reports Book All Reports acls-20240228.xsd acls-20240228_lab.xml acls-20240228_pre.xml tm246619d1_8k.htm http://xbrl.sec.gov/dei/2023 true false JSON 16 MetaLinks.json IDEA: XBRL DOCUMENT { "version": "2.2", "instance": { "tm246619d1_8k.htm": { "nsprefix": "acls", "nsuri": "http://axcelis.com/20240228", "dts": { "schema": { "local": [ "acls-20240228.xsd" ], "remote": [ "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd", "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd", "http://www.xbrl.org/2003/xl-2003-12-31.xsd", "http://www.xbrl.org/2003/xlink-2003-12-31.xsd", "http://www.xbrl.org/2005/xbrldt-2005.xsd", "http://www.xbrl.org/2006/ref-2006-02-27.xsd", "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd", "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd", "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd", "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd", "https://www.xbrl.org/dtr/type/2022-03-31/types.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-roles-2023.xsd", "https://xbrl.fasb.org/srt/2023/elts/srt-types-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-gaap-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-roles-2023.xsd", "https://xbrl.fasb.org/us-gaap/2023/elts/us-types-2023.xsd", "https://xbrl.sec.gov/country/2023/country-2023.xsd", "https://xbrl.sec.gov/dei/2023/dei-2023.xsd" ] }, "labelLink": { "local": [ "acls-20240228_lab.xml" ] }, "presentationLink": { "local": [ "acls-20240228_pre.xml" ] }, "inline": { "local": [ "tm246619d1_8k.htm" ] } }, "keyStandard": 22, "keyCustom": 0, "axisStandard": 0, "axisCustom": 0, "memberStandard": 0, "memberCustom": 0, "hidden": { "total": 2, "http://xbrl.sec.gov/dei/2023": 2 }, "contextCount": 1, "entityCount": 1, "segmentCount": 0, "elementCount": 59, "unitCount": 3, "baseTaxonomies": { "http://xbrl.sec.gov/dei/2023": 22 }, "report": { "R1": { "role": "http://axcelis.com/role/Cover", "longName": "00000001 - Document - Cover", "shortName": "Cover", "isDefault": "true", "groupType": "document", "subGroupType": "", "menuCat": "Cover", "order": "1", "firstAnchor": { "contextRef": "AsOf2024-02-28", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "b", "p", "body", "html" ], "reportCount": 1, "baseRef": "tm246619d1_8k.htm", "first": true, "unique": true }, "uniqueAnchor": { "contextRef": "AsOf2024-02-28", "name": "dei:DocumentType", "unitRef": null, "xsiNil": "false", "lang": "en-US", "decimals": null, "ancestors": [ "span", "b", "p", "body", "html" ], "reportCount": 1, "baseRef": "tm246619d1_8k.htm", "first": true, "unique": true } } }, "tag": { "dei_AmendmentDescription": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AmendmentDescription", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Amendment Description", "documentation": "Description of changes contained within amended document." } } }, "auth_ref": [] }, "dei_AmendmentFlag": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AmendmentFlag", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Amendment Flag", "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission." } } }, "auth_ref": [] }, "dei_AnnualInformationForm": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AnnualInformationForm", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Annual Information Form", "documentation": "Boolean flag with value true on a form if it is an annual report containing an annual information form." } } }, "auth_ref": [ "r14" ] }, "dei_AuditedAnnualFinancialStatements": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "AuditedAnnualFinancialStatements", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Audited Annual Financial Statements", "documentation": "Boolean flag with value true on a form if it is an annual report containing audited financial statements." } } }, "auth_ref": [ "r14" ] }, "dei_CityAreaCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CityAreaCode", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "City Area Code", "documentation": "Area code of city" } } }, "auth_ref": [] }, "dei_CountryRegion": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CountryRegion", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Country Region", "documentation": "Region code of country" } } }, "auth_ref": [] }, "dei_CoverAbstract": { "xbrltype": "stringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CoverAbstract", "lang": { "en-us": { "role": { "label": "Cover [Abstract]", "documentation": "Cover page." } } }, "auth_ref": [] }, "dei_CurrentFiscalYearEndDate": { "xbrltype": "gMonthDayItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "CurrentFiscalYearEndDate", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Current Fiscal Year End Date", "documentation": "End date of current fiscal year in the format --MM-DD." } } }, "auth_ref": [] }, "dei_DocumentAccountingStandard": { "xbrltype": "accountingStandardItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentAccountingStandard", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Accounting Standard", "documentation": "The basis of accounting the registrant has used to prepare the financial statements included in this filing This can either be 'U.S. GAAP', 'International Financial Reporting Standards', or 'Other'." } } }, "auth_ref": [ "r13" ] }, "dei_DocumentAnnualReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentAnnualReport", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Annual Report", "documentation": "Boolean flag that is true only for a form used as an annual report." } } }, "auth_ref": [ "r11", "r13", "r14" ] }, "dei_DocumentFiscalPeriodFocus": { "xbrltype": "fiscalPeriodItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentFiscalPeriodFocus", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Fiscal Period Focus", "documentation": "Fiscal period values are FY, Q1, Q2, and Q3. 1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY." } } }, "auth_ref": [] }, "dei_DocumentFiscalYearFocus": { "xbrltype": "gYearItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentFiscalYearFocus", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Fiscal Year Focus", "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006." } } }, "auth_ref": [] }, "dei_DocumentPeriodEndDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentPeriodEndDate", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Period End Date", "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period. The format of the date is YYYY-MM-DD." } } }, "auth_ref": [] }, "dei_DocumentPeriodStartDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentPeriodStartDate", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Period Start Date", "documentation": "The start date of the period covered in the document, in YYYY-MM-DD format." } } }, "auth_ref": [] }, "dei_DocumentQuarterlyReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentQuarterlyReport", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Quarterly Report", "documentation": "Boolean flag that is true only for a form used as an quarterly report." } } }, "auth_ref": [ "r12" ] }, "dei_DocumentRegistrationStatement": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentRegistrationStatement", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Registration Statement", "documentation": "Boolean flag that is true only for a form used as a registration statement." } } }, "auth_ref": [ "r0" ] }, "dei_DocumentShellCompanyEventDate": { "xbrltype": "dateItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentShellCompanyEventDate", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Shell Company Event Date", "documentation": "Date of event requiring a shell company report." } } }, "auth_ref": [ "r13" ] }, "dei_DocumentShellCompanyReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentShellCompanyReport", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Shell Company Report", "documentation": "Boolean flag that is true for a Shell Company Report pursuant to section 13 or 15(d) of the Exchange Act." } } }, "auth_ref": [ "r13" ] }, "dei_DocumentTransitionReport": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentTransitionReport", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Transition Report", "documentation": "Boolean flag that is true only for a form used as a transition report." } } }, "auth_ref": [ "r15" ] }, "dei_DocumentType": { "xbrltype": "submissionTypeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentType", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Document Type", "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'." } } }, "auth_ref": [] }, "dei_DocumentsIncorporatedByReferenceTextBlock": { "xbrltype": "textBlockItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "DocumentsIncorporatedByReferenceTextBlock", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Documents Incorporated by Reference [Text Block]", "documentation": "Documents incorporated by reference." } } }, "auth_ref": [ "r3" ] }, "dei_EntityAddressAddressLine1": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine1", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line One", "documentation": "Address Line 1 such as Attn, Building Name, Street Name" } } }, "auth_ref": [] }, "dei_EntityAddressAddressLine2": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine2", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line Two", "documentation": "Address Line 2 such as Street or Suite number" } } }, "auth_ref": [] }, "dei_EntityAddressAddressLine3": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressAddressLine3", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, Address Line Three", "documentation": "Address Line 3 such as an Office Park" } } }, "auth_ref": [] }, "dei_EntityAddressCityOrTown": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressCityOrTown", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, City or Town", "documentation": "Name of the City or Town" } } }, "auth_ref": [] }, "dei_EntityAddressCountry": { "xbrltype": "countryCodeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressCountry", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, Country", "documentation": "ISO 3166-1 alpha-2 country code." } } }, "auth_ref": [] }, "dei_EntityAddressPostalZipCode": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressPostalZipCode", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, Postal Zip Code", "documentation": "Code for the postal or zip code" } } }, "auth_ref": [] }, "dei_EntityAddressStateOrProvince": { "xbrltype": "stateOrProvinceItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityAddressStateOrProvince", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Address, State or Province", "documentation": "Name of the state or province." } } }, "auth_ref": [] }, "dei_EntityBankruptcyProceedingsReportingCurrent": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityBankruptcyProceedingsReportingCurrent", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Bankruptcy Proceedings, Reporting Current", "documentation": "For registrants involved in bankruptcy proceedings during the preceding five years, the value Yes indicates that the registrant has filed all documents and reports required to be filed by Section 12, 13 or 15(d) of the Securities Exchange Act of 1934 subsequent to the distribution of securities under a plan confirmed by a court; the value No indicates the registrant has not. Registrants not involved in bankruptcy proceedings during the preceding five years should not report this element." } } }, "auth_ref": [ "r6" ] }, "dei_EntityCentralIndexKey": { "xbrltype": "centralIndexKeyItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCentralIndexKey", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Central Index Key", "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK." } } }, "auth_ref": [ "r2" ] }, "dei_EntityCommonStockSharesOutstanding": { "xbrltype": "sharesItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCommonStockSharesOutstanding", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Common Stock, Shares Outstanding", "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument." } } }, "auth_ref": [] }, "dei_EntityCurrentReportingStatus": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityCurrentReportingStatus", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Current Reporting Status", "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure." } } }, "auth_ref": [] }, "dei_EntityEmergingGrowthCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityEmergingGrowthCompany", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Emerging Growth Company", "documentation": "Indicate if registrant meets the emerging growth company criteria." } } }, "auth_ref": [ "r2" ] }, "dei_EntityExTransitionPeriod": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityExTransitionPeriod", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Elected Not To Use the Extended Transition Period", "documentation": "Indicate if an emerging growth company has elected not to use the extended transition period for complying with any new or revised financial accounting standards." } } }, "auth_ref": [ "r19" ] }, "dei_EntityFileNumber": { "xbrltype": "fileNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFileNumber", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity File Number", "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen." } } }, "auth_ref": [] }, "dei_EntityFilerCategory": { "xbrltype": "filerCategoryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityFilerCategory", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Filer Category", "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure." } } }, "auth_ref": [ "r2" ] }, "dei_EntityIncorporationStateCountryCode": { "xbrltype": "edgarStateCountryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityIncorporationStateCountryCode", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Incorporation, State or Country Code", "documentation": "Two-character EDGAR code representing the state or country of incorporation." } } }, "auth_ref": [] }, "dei_EntityInteractiveDataCurrent": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityInteractiveDataCurrent", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Interactive Data Current", "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files)." } } }, "auth_ref": [ "r16" ] }, "dei_EntityPrimarySicNumber": { "xbrltype": "sicNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityPrimarySicNumber", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Primary SIC Number", "documentation": "Primary Standard Industrial Classification (SIC) Number for the Entity." } } }, "auth_ref": [ "r14" ] }, "dei_EntityPublicFloat": { "xbrltype": "monetaryItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityPublicFloat", "crdr": "credit", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Public Float", "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter." } } }, "auth_ref": [] }, "dei_EntityRegistrantName": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityRegistrantName", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Registrant Name", "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC." } } }, "auth_ref": [ "r2" ] }, "dei_EntityShellCompany": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityShellCompany", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Shell Company", "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act." } } }, "auth_ref": [ "r2" ] }, "dei_EntitySmallBusiness": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntitySmallBusiness", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Small Business", "documentation": "Indicates that the company is a Smaller Reporting Company (SRC)." } } }, "auth_ref": [ "r2" ] }, "dei_EntityTaxIdentificationNumber": { "xbrltype": "employerIdItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityTaxIdentificationNumber", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Tax Identification Number", "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS." } } }, "auth_ref": [ "r2" ] }, "dei_EntityVoluntaryFilers": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityVoluntaryFilers", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Voluntary Filers", "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act." } } }, "auth_ref": [] }, "dei_EntityWellKnownSeasonedIssuer": { "xbrltype": "yesNoItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "EntityWellKnownSeasonedIssuer", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Entity Well-known Seasoned Issuer", "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A." } } }, "auth_ref": [ "r17" ] }, "dei_Extension": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Extension", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Extension", "documentation": "Extension number for local phone number." } } }, "auth_ref": [] }, "dei_LocalPhoneNumber": { "xbrltype": "normalizedStringItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "LocalPhoneNumber", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Local Phone Number", "documentation": "Local phone number for entity." } } }, "auth_ref": [] }, "dei_NoTradingSymbolFlag": { "xbrltype": "trueItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "NoTradingSymbolFlag", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "No Trading Symbol Flag", "documentation": "Boolean flag that is true only for a security having no trading symbol." } } }, "auth_ref": [] }, "dei_OtherReportingStandardItemNumber": { "xbrltype": "otherReportingStandardItemNumberItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "OtherReportingStandardItemNumber", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Other Reporting Standard Item Number", "documentation": "\"Item 17\" or \"Item 18\" specified when the basis of accounting is neither US GAAP nor IFRS." } } }, "auth_ref": [ "r13" ] }, "dei_PreCommencementIssuerTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementIssuerTenderOffer", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Issuer Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act." } } }, "auth_ref": [ "r7" ] }, "dei_PreCommencementTenderOffer": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "PreCommencementTenderOffer", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Pre-commencement Tender Offer", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act." } } }, "auth_ref": [ "r8" ] }, "dei_Security12bTitle": { "xbrltype": "securityTitleItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Security12bTitle", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Title of 12(b) Security", "documentation": "Title of a 12(b) registered security." } } }, "auth_ref": [ "r1" ] }, "dei_Security12gTitle": { "xbrltype": "securityTitleItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "Security12gTitle", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Title of 12(g) Security", "documentation": "Title of a 12(g) registered security." } } }, "auth_ref": [ "r5" ] }, "dei_SecurityExchangeName": { "xbrltype": "edgarExchangeCodeItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SecurityExchangeName", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Security Exchange Name", "documentation": "Name of the Exchange on which a security is registered." } } }, "auth_ref": [ "r4" ] }, "dei_SecurityReportingObligation": { "xbrltype": "securityReportingObligationItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SecurityReportingObligation", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Security Reporting Obligation", "documentation": "15(d), indicating whether the security has a reporting obligation under that section of the Exchange Act." } } }, "auth_ref": [ "r9" ] }, "dei_SolicitingMaterial": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "SolicitingMaterial", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Soliciting Material", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act." } } }, "auth_ref": [ "r10" ] }, "dei_TradingSymbol": { "xbrltype": "tradingSymbolItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "TradingSymbol", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Trading Symbol", "documentation": "Trading symbol of an instrument as listed on an exchange." } } }, "auth_ref": [] }, "dei_WrittenCommunications": { "xbrltype": "booleanItemType", "nsuri": "http://xbrl.sec.gov/dei/2023", "localname": "WrittenCommunications", "presentation": [ "http://axcelis.com/role/Cover" ], "lang": { "en-us": { "role": { "label": "Written Communications", "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act." } } }, "auth_ref": [ "r18" ] } } } }, "std_ref": { "r0": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12" }, "r1": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b" }, "r2": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b-2" }, "r3": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "b-23" }, "r4": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "d1-1" }, "r5": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12", "Subsection": "g" }, "r6": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "12, 13, 15d" }, "r7": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "13e", "Subsection": "4c" }, "r8": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "14d", "Subsection": "2b" }, "r9": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Number": "240", "Section": "15", "Subsection": "d" }, "r10": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Exchange Act", "Section": "14a", "Number": "240", "Subsection": "12" }, "r11": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 10-K", "Number": "249", "Section": "310" }, "r12": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 10-Q", "Number": "240", "Section": "308", "Subsection": "a" }, "r13": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 20-F", "Number": "249", "Section": "220", "Subsection": "f" }, "r14": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Form 40-F", "Number": "249", "Section": "240", "Subsection": "f" }, "r15": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Forms 10-K, 10-Q, 20-F", "Number": "240", "Section": "13", "Subsection": "a-1" }, "r16": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Regulation S-T", "Number": "232", "Section": "405" }, "r17": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Securities Act", "Number": "230", "Section": "405" }, "r18": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Securities Act", "Number": "230", "Section": "425" }, "r19": { "role": "http://www.xbrl.org/2003/role/presentationRef", "Publisher": "SEC", "Name": "Securities Act", "Number": "7A", "Section": "B", "Subsection": "2" } } } ZIP 17 0001104659-24-029398-xbrl.zip IDEA: XBRL DOCUMENT begin 644 0001104659-24-029398-xbrl.zip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end XML 18 tm246619d1_8k_htm.xml IDEA: XBRL DOCUMENT 0001113232 2024-02-28 2024-02-28 iso4217:USD shares iso4217:USD shares false 0001113232 8-K 2024-02-28 Axcelis Technologies, Inc. DE 000-30941 34-1818596 108 Cherry Hill Drive Beverly MA 01915 978 787-4000 false false false false Common Stock, $0.001 par value ACLS NASDAQ false