Represents the information pertaining to the prepayment penalty.

No definition available.

Name:	acls_DebtInstrumentEarlyTerminationFeeAndPenalty
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Represents the early termination fee as a percentage relating to the debt agreement.

+ References

No definition available.

+ Details

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Namespace Prefix:	acls_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Represents the limitation on the ability to borrow expressed as a percentage of the then current amount of qualified accounts receivable.

+ References

No definition available.

+ Details

Name:	acls_LineOfCreditBorrowingCapacityAsPercentageOfQualifiedAccountsReceivable
Namespace Prefix:	acls_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.

+ References

No definition available.

+ Details

Name:	acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

The cash outflow for debt including accrued interest and pre-payment penalty.

+ References

No definition available.

+ Details

Name:	acls_RepaymentOfDebtIncludingInterestAndPrepaymentPenalty
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Details

Name:	us-gaap_DebtInstrumentLineItems
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Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Period of time between issuance and maturity of debt instrument, in PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

No definition available.

+ Details

Name:	us-gaap_DebtInstrumentTerm
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of interest payable on debt, including, but not limited to, trade payables.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 942

-SubTopic 210

-Section S99

-Paragraph 1

-Subparagraph (SX 210.9-03.15(5))

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-Publisher SEC

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-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 03

-Paragraph 15

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+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Term of the lessee's leasing arrangement, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

+ References

No definition available.

+ Details

Name:	us-gaap_LesseeLeasingArrangementsOperatingLeasesTermOfContract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 210

-SubTopic 10

-Section S99

-Paragraph 1

-Subparagraph (SX 210.5-02.19(b),22(b))

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Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher SEC

-Name Regulation S-X (SX)

-Number 210

-Section 02

-Paragraph 19, 22

-Article 5

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of borrowing capacity currently available under the credit facility (current borrowing capacity less the amount of borrowings outstanding).

+ References

+ Details

Name:	us-gaap_LineOfCreditFacilityRemainingBorrowingCapacity
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 15

-Subparagraph (b)

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-Publisher FASB

-Name Accounting Standards Codification

-Glossary Financing Activities

-URI http://asc.fasb.org/extlink&oid=6513228

+ Details

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Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The liability due as of the balance sheet date for leasebacks accounted for using the deposit method.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 840

-SubTopic 10

-Section 50

-Paragraph 2

-URI http://asc.fasb.org/extlink&oid=6452660&loc=d3e36991-112694

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-Topic 840

-SubTopic 40

-Section 50

-Paragraph 1

-URI http://asc.fasb.org/extlink&oid=6456341&loc=d3e50796-112755

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Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of cash inflow before closing and deferred financing costs received by a seller-lessee in a sale-leaseback recognized in financing activities.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 840

-SubTopic 40

-Section 55

-Paragraph 51

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-Topic 840

-SubTopic 40

-Section 55

-Paragraph 52

-URI http://asc.fasb.org/extlink&oid=28365400&loc=d3e51843-112757

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Balance Type:	debit
Period Type:	duration

- Definition

The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.

+ References

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Details

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Financing Arrangements (Details) (USD $)	3 Months Ended	0 Months Ended
Financing Arrangements (Details) (USD $)	Mar. 31, 2015	Jan. 30, 2015	Feb. 02, 2015	Oct. 31, 2013
Financing Arrangements
Repayment of debt	$ 14,530,000us-gaap_RepaymentsOfLongTermDebt
Financing obligation	47,586,000
Beverly Property Owner LLC
Financing Arrangements
Lease term		22 years
Beverly Property Owner LLC \| Sale and Leaseback \| Buildings
Financing Arrangements
Purchase price		48,900,000
Lease term		22 years
Financing obligation	47,600,000	48,500,000
Security deposit		5,900,000
Term Loan
Financing Arrangements
Repayment of debt		14,400,000	14,400,000
Accrued interest related to repayment of outstanding loan			100,000
Prepayment penalty (as a percent)			2.00%
Prepayment penalty			300,000
Total payment		14,800,000	14,800,000
Revolving credit facility
Financing Arrangements
Maximum borrowing capacity under the credit facility				10,000,000
Term				2 years
Availability used to support outstanding letters of credit	6,900,000
Available borrowing capacity under the credit facility	3,100,000
Revolving credit facility \| Maximum
Financing Arrangements
Limitation on ability to borrow expressed as a percentage of the then current amount of qualified accounts receivable				80.00%
Revolving credit facility \| Sale and Leaseback
Financing Arrangements
Security deposit	$ 5,900,000