Represents the information pertaining to implicit interest rate on the associated cash flows during the initial lease term.

No definition available.

+ Details

Name:	acls_ImplicitInterestRateOnAssociatedCashFlows
Namespace Prefix:	acls_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	duration

- Definition

Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Cash

-URI http://asc.fasb.org/extlink&oid=6506951

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Glossary Cash Equivalents

-URI http://asc.fasb.org/extlink&oid=6507016

+ Details

Name:	us-gaap_CashAndCashEquivalentsFairValueDisclosure
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Fair value portion of debt instrument payable, including, but not limited to, notes payable and loans payable.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 825

-SubTopic 10

-Section 50

-Paragraph 10

-Subparagraph (a)

-URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13433-108611

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 825

-SubTopic 10

-Section 50

-Paragraph 12

-URI http://asc.fasb.org/extlink&oid=35750535&loc=d3e13476-108611

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Details

Name:	us-gaap_FairValueByLiabilityClassAxis=acls_SaleAndLeaseBackMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

Fair Value Measurements (Details) (USD $) In Thousands, unless otherwise specified	2 Months Ended
	Mar. 31, 2015	Dec. 31, 2014
Sale and Leaseback
Fair Value Measurements
Implicit interest rate on associated cash flows	10.65%
Recurring \| Total \| Sale and Leaseback
Fair Value Measurements
Sale leaseback obligation/Term loan	47,586
Recurring \| Total \| Term Loan
Fair Value Measurements
Sale leaseback obligation/Term loan		14,530
Recurring \| Total \| Money market funds
Fair Value Measurements
Money market funds	60,106	7,004
Recurring \| Level 1 \| Money market funds
Fair Value Measurements
Money market funds	60,106	7,004
Recurring \| Level 2 \| Term Loan
Fair Value Measurements
Sale leaseback obligation/Term loan		14,530
Recurring \| Level 3 \| Sale and Leaseback
Fair Value Measurements
Sale leaseback obligation/Term loan	47,586