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Stock-Based Compensation (Details) (USD $)
In Millions, except Share data, unless otherwise specified
3 Months Ended
Mar. 31, 2015
Mar. 31, 2014
Stock-Based Compensation    
Stock-based compensation expense (in dollars) $ 1.1us-gaap_AllocatedShareBasedCompensationExpense $ 1.2us-gaap_AllocatedShareBasedCompensationExpense
2000 Stock Plan    
Stock award plans and stock-based compensation    
Number of shares of common stock available for future grant 0us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardNumberOfSharesAvailableForGrant
/ us-gaap_PlanNameAxis
= acls_StockPlan2000Member