Inventories, net (Tables)

3 Months Ended

Mar. 31, 2015

Inventories, net

Schedule of components of inventories

	March 31,		December 31,
	2015		2014
	(in thousands)
Raw materials	$	70,975	$	65,723
Work in process	24,655		22,358
Finished goods (completed systems)	13,895		15,982
	$	109,525	$	104,063